MEMS Milestones

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History of MEMS: The history of MEMS is important for representing its applications, diversity and challenges. The following list shows a few of the key MEMS milestones. S:’1950 1958: in this year Silicon strain gauge commercially existence. 1959: [There are many of Room at the undermost] – "Richard Feynman" gives a milestone show at the California establishment of Technology. He exports a public challenge by offering ($1000) to the first person to create an electrical motor less than 1/64th of an inch. S:’1960 : The First silicon pressure sensor demonstrated.1961 1967: Invention of surface micromachining. Westinghouse makes the Resonant Gate Field Effect Transistor, [RGT]. Depiction of use of sacrificial material to free micro mechanical…show more content…
Affordable and receptive access to MEMS fabrication facilities is decisive for the commercialization of MEMS. * Design, Simulation and Modelling: Due to the highly integrated and interdisciplinary nature of MEMS, it is hard to separate device design from the complexities of contrivance thus a high-level of processing and fabrication knowledge is important for designing a MEMS device. Moreover, considerable time and expense is spent during this development and subsequent prototype stage. Due to increase creativity and innovation and reduce unnecessary [time-to-market] costs, an interface should be existed to separate fabrication and design. As successful device development as well requires designing and simulation, it is significant that MEMS designers have access to suitable analytical tools. By the way, MEMS devices now use older design tools and are invented on a [error and trial] basis. Therefore, more powerful and modelling tools and advancing simulation are necessary for accurate prediction…show more content…
Most of the research today is focused on surface micro-machining, but in the industry the most shipped devices are still produced using much older bulk methods. Although some surface micro-machined devices are produced in volume, it will take some years for this approach to make a large impact; devices using both bulk and surface continue to be marketed. In spite of MEMS exist an enabling technology for the development and production of many new consumer and industrial products, MEMS is also a disruptive technology in that it differs significantly from existing technology, requiring a completely different set of capabilities and competencies to implement it. MEMS involves most scaling, packaging and testing issues as a disruptive technology, faces challenges associated with developing industrialization processes that no longer fit with established methods. For the true commercialization of MEMS, foundries must overcome the critical technological bottlenecks, the economic feasibility of integrating MEMS-based components, as well as the market uncertainty for such devices and applications. Cost reduction is critical and will ultimately result from better availability of infrastructure, more reliable manufacturing processes and technical

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